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Active Vibration Cancellation System SEM-Base™

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Active Piezoelectric Vibration Cancellation Floor Platform for Scanning Electron Microscopes

STACIS® iX SEM-Base™ active vibration cancellation floor platform system is designed for use with scanning electron microscopes (SEMs). SEMs are among the most vibration sensitive tools made, and these precision instruments typically incorporate an internal vibration isolation system to address problematic vibration from the floor and the SEM frame above 5-10 Hz. SEM-Base is compatible with all internal SEM vibration control  systems and aggressively mitigates low frequency floor vibration starting at 0.6 Hz.

SEM-Base is a compact, cost-effective alternative to the 65 Series STACIS® 2100 Floor Platform. It incorporates STACIS technology but has a much smaller footprint and installs easily with minimal or no tuning.

With vibration cancellation starting below 1 Hz, SEM-Base features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich four isolators and TMC’s DC 2000 digital controller. The system is only 15 cm tall, measures 89 x 112 cm, weighs roughly 295 kg, and can support 408 to 1134 kilograms with no soft air suspension.

NOTE: See SEM-Closure™, a total environmental solution designed specifically to protect SEMs. It can accommodate SEM-Base and Mag-NetX™ in a sealed and temperature-controlled acoustical chamber – protecting the SEM from vibration, magnetic field disturbances, and acoustic noise.

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