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STACIS® 2100

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STACIS® 2100
Active Piezoelectric Vibration Cancellation System

STACIS® is the world’s most advanced active vibration control system. Employing advanced inertial vibration sensors and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric actuators to filter out floor motion down to very low frequency.      Primarily designed to isolate precision microlithography, metrology, and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard vibration isolation solution for the most sensitive instruments in noisy environments.

No other commercially available vibration isolation system offers the performance of STACIS, particularly for sub-Hz low frequency vibration cancellation.

Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air systems. There is no “soft” suspension and, unlike active air systems, STACIS can be “stacked” (placed beneath a tool with an internal active air vibration isolation system).

In addition to facilitating optimal tool performance and resolution in noisy fabs, STACIS is guaranteed to meet the floor vibration specifications of wafer inspection, metrology and microlithography tools.*      With many hundreds of successful installations worldwide, STACIS is the ideal vibration isolation system for the most vibration-sensitive instruments.

*Guarantee is contingent on TMC’s comparison and review of the site floor vibration data against the tool floor vibration criteria and confirmation that the STACIS transfer function will provide the required isolation.

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