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Phenom ProX G5

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The Phenom ProX Generation 5 desktop scanning electron microscope is the ultimate all-in-one imaging and X-ray analysis system.

With the Phenom ProX desktop SEM, sample structures can be physically examined and their elemental composition determined. Viewing three-dimensional images of microscopic structures only solves half the problem when analyzing samples. It is often necessary to collect more than optical data to be able to identify the different elements in a specimen. This is accomplished in the Phenom proX with a fully integrated and specifically designed EDS detector.

EDS is a technique that analyzes X-rays generated by the bombardment of the sample by an electron beam. EDS elemental analysis is fully embedded into the Phenom ProX system. X-ray detector and control software are combined in one package. This Elemental Identification (EID) software package allows the user to program multiple point analysis, and identify any hidden elements within the sample. Additionally, this software can be expanded with elemental mapping functionality. The step-by-step guided process within the EID software helps the user to collect all X-ray results in an organized and structured way.

System details

Phenom ProX
Light optical magnification 20 - 135x
Electron optical magnification range 80 - 150,000x
Resolution < 10 nm (BSED) / < 8 nm (SED)
Digital zoom Max. 12x
Light optical navigation camera Color
High voltages

5 kV, 10 kV, 15 kV (optional 20kV)

Advanced mode: adjustable range between

4.8 kV and 15 kV imaging and analysis mode

Multiple beam currents Charge reduction