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DST3 triple target desktop sputter coater

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DST3 is a high vacuum, triple target, magnetron desktop sputter coater

The Desk Sputter Coater DST3 is a desktop, triple target, turbo molecular-pumped vacuum sputter coater, suitable for magnetron sputtering of the semiconductors, dielectrics and (oxidizing & noble) metals. The system also can be fitted by an evaporation source for thermal evaporation process.


The sputtering machine model DST3 is equipped with a large chamber and triple water – cooled cathodes which make it suitable for both sputtering a single large diameter specimen and co-sputtering a small diameter specimen. Magnetron sputtering process caused Desk Sputter Coater DST3 produces dens thin films with very good adhesion.

Features

  • High vacuum turbo pump 300 l/s
  • Diaphragm backing pump
  • Full range vacuum gauge
  • Three 2” water – cooled sputtering cathodes
  • Large chamber suitable for large specimen sputtering depositions
  • Target selection for multilayer thin films
  • Co-sputtering to form alloy films
  • Two Quartz crystal monitoring system for real-time thickness measurement (1 nm precision)
  • Manual or automatic Timed and Thickness deposition
  • Intuitive touch screen to control the coating process and rapid data input
  • User-friendly software that can be updated via the network
  • Equipped with the electronic shutter
  • Equipped with a rotary sample holder with the ability to tilt in direction of cathodes
  • 500 °C substrate heater
  • 300 V DC substrate bias voltages
  • Unlimited sputtering time without breaking the vacuum