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Acoustic Enclosure for SEMs
SEM-Closure™ is an acoustic enclosure designed specifically for scanning electron microscopes (SEMs). Together with TMC’s SEM-Base™ floor platform and Mag-NetX™ magnetic field cancellation, SEM-Closure™ provides a total environmental solution to protect sensitive SEMs from all outside interference.
SEM-Closure is designed to accommodate SEM-Base™, an active piezoelectric vibration cancellation floor platform, and Mag-NetX™ in a sealed and temperature-controlled acoustical chamber – protecting the SEM from vibration, magnetic field disturbances, and acoustic noise.
Integration of the three systems ensures proper fit and compatibility. The vibration isolation system can be inside the enclosure itself. Also, the SEM-Closure frame is designed to accommodate Mag-NetX Helmholtz coils as well as the acoustic panels, eliminating the need for a second frame to house the coils. SEM-Closure provides multiple access points, a heat dissipation system, and provisions for tool plumbing and cabling within the system.