Active Vibration Isolation Systems


STACIS iX headPrimarily designed to isolate precision microlithography, metrology and inspection equipment in advanced semiconductor factories, STACIS is now the industry standard solution for the most sensitive instruments in noisy environments.

STACIS® iX Stage-Base™

Simple, Robust, and Cost-effective Stage-Base Stage-Base™ is specifically designed to be built into advanced semiconductor tools which incorporate high precision motorized X-Y stages. Such tools require extremely efficient vibration isolation. But, just as critical,...

STACIS® 2100

STACIS® is the world’s most advanced active vibration control system. Employing advanced inertial vibration sensors and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by sensing floor vibration, then expanding and contracting piezoelectric...

Quiet Island®

Semiconductor manufacturing factories (fabs) incorporate a system of raised false floors to accommodate complex facilities requirements (plumbing, electrical cables, gas piping, etc.) and to maintain strict cleanliness standards. Such floors present a challenge to...

65 SERIES Floor Platform with STACIS®

For conventional lab floors, isolating building floor vibration from large, tall tools presents an ergonomic challenge. Placing the isolators directly beneath the tool may raise the tool to an impractical height. Furthermore, conventional air...

STACIS® III

STACIS® III is the most advanced active vibration cancellation system. Employing advanced inertial vibration sensors, sophisticated control algorithms, and state-of-the-art piezoelectric actuators, STACIS cancels vibration in real time by continuously measuring floor activity, then expanding and...

Everstill™ K-400

Introducing Everstill™, TMC’s latest breakthrough in advanced floor vibration control. The patented Everstill K-400 is a bench-top active vibration cancellation platform which incorporates a “serial type” active architecture. This combined with velocity sensors for...